diff --git a/src/Storages/MergeTree/MergeTreeDataMergerMutator.cpp b/src/Storages/MergeTree/MergeTreeDataMergerMutator.cpp
index 00a599af9c3..271d22de3bd 100644
--- a/src/Storages/MergeTree/MergeTreeDataMergerMutator.cpp
+++ b/src/Storages/MergeTree/MergeTreeDataMergerMutator.cpp
@@ -783,7 +783,7 @@ MergeTreeData::MutableDataPartPtr MergeTreeDataMergerMutator::mergePartsToTempor
     auto compression_codec = data.getCompressionCodecForPart(merge_entry->total_size_bytes_compressed, new_data_part->ttl_infos, time_of_merge);
 
     auto tmp_disk = context->getTemporaryVolume()->getDisk();
-    String rows_sources_file_path;
+    std::unique_ptr<TemporaryFile> rows_sources_file;
     std::unique_ptr<WriteBufferFromFileBase> rows_sources_uncompressed_write_buf;
     std::unique_ptr<WriteBuffer> rows_sources_write_buf;
     std::optional<ColumnSizeEstimator> column_sizes;
@@ -792,9 +792,8 @@ MergeTreeData::MutableDataPartPtr MergeTreeDataMergerMutator::mergePartsToTempor
 
     if (chosen_merge_algorithm == MergeAlgorithm::Vertical)
     {
-        tmp_disk->createDirectories(new_part_tmp_path);
-        rows_sources_file_path = new_part_tmp_path + "rows_sources";
-        rows_sources_uncompressed_write_buf = tmp_disk->writeFile(rows_sources_file_path);
+        rows_sources_file = createTemporaryFile(tmp_disk->getPath());
+        rows_sources_uncompressed_write_buf = tmp_disk->writeFile(fileName(rows_sources_file->path()));
         rows_sources_write_buf = std::make_unique<CompressedWriteBuffer>(*rows_sources_uncompressed_write_buf);
 
         MergeTreeData::DataPart::ColumnToSize merged_column_to_size;
@@ -1030,7 +1029,7 @@ MergeTreeData::MutableDataPartPtr MergeTreeDataMergerMutator::mergePartsToTempor
                 + ") differs from number of bytes written to rows_sources file (" + toString(rows_sources_count)
                 + "). It is a bug.", ErrorCodes::LOGICAL_ERROR);
 
-        CompressedReadBufferFromFile rows_sources_read_buf(tmp_disk->readFile(rows_sources_file_path));
+        CompressedReadBufferFromFile rows_sources_read_buf(tmp_disk->readFile(fileName(rows_sources_file->path())));
         IMergedBlockOutputStream::WrittenOffsetColumns written_offset_columns;
 
         for (size_t column_num = 0, gathering_column_names_size = gathering_column_names.size();
@@ -1101,8 +1100,6 @@ MergeTreeData::MutableDataPartPtr MergeTreeDataMergerMutator::mergePartsToTempor
             merge_entry->bytes_written_uncompressed += column_gathered_stream.getProfileInfo().bytes;
             merge_entry->progress.store(progress_before + column_sizes->columnWeight(column_name), std::memory_order_relaxed);
         }
-
-        tmp_disk->removeFile(rows_sources_file_path);
     }
 
     for (const auto & part : parts)