diff --git a/src/Analyzer/Resolve/QueryAnalyzer.cpp b/src/Analyzer/Resolve/QueryAnalyzer.cpp
index 390418494e7..03ebd893c47 100644
--- a/src/Analyzer/Resolve/QueryAnalyzer.cpp
+++ b/src/Analyzer/Resolve/QueryAnalyzer.cpp
@@ -1,3 +1,4 @@
+#include <Interpreters/ProcessorsProfileLog.h>
 #include <Common/FieldVisitorToString.h>
 
 #include <DataTypes/DataTypesNumber.h>
@@ -676,6 +677,8 @@ void QueryAnalyzer::evaluateScalarSubqueryIfNeeded(QueryTreeNodePtr & node, Iden
                         "tuple"});
                 }
             }
+
+            logProcessorProfile(context, io.pipeline.getProcessors());
         }
 
         scalars_cache.emplace(node_with_hash, scalar_block);
diff --git a/src/Interpreters/ExecuteScalarSubqueriesVisitor.cpp b/src/Interpreters/ExecuteScalarSubqueriesVisitor.cpp
index d4da038c089..9ae2ffc208d 100644
--- a/src/Interpreters/ExecuteScalarSubqueriesVisitor.cpp
+++ b/src/Interpreters/ExecuteScalarSubqueriesVisitor.cpp
@@ -5,9 +5,11 @@
 #include <Core/Settings.h>
 #include <DataTypes/DataTypeNullable.h>
 #include <DataTypes/DataTypeTuple.h>
+#include <IO/WriteBufferFromString.h>
 #include <IO/WriteHelpers.h>
 #include <Interpreters/Context.h>
 #include <Interpreters/InterpreterSelectWithUnionQuery.h>
+#include <Interpreters/ProcessorsProfileLog.h>
 #include <Interpreters/addTypeConversionToAST.h>
 #include <Interpreters/misc.h>
 #include <Parsers/ASTExpressionList.h>
@@ -19,9 +21,8 @@
 #include <Parsers/ASTWithElement.h>
 #include <Parsers/queryToString.h>
 #include <Processors/Executors/PullingAsyncPipelineExecutor.h>
-#include <Common/ProfileEvents.h>
 #include <Common/FieldVisitorToString.h>
-#include <IO/WriteBufferFromString.h>
+#include <Common/ProfileEvents.h>
 
 namespace ProfileEvents
 {
@@ -246,6 +247,8 @@ void ExecuteScalarSubqueriesMatcher::visit(const ASTSubquery & subquery, ASTPtr
 
             if (tmp_block.rows() != 0)
                 throw Exception(ErrorCodes::INCORRECT_RESULT_OF_SCALAR_SUBQUERY, "Scalar subquery returned more than one row");
+
+            logProcessorProfile(data.getContext(), io.pipeline.getProcessors());
         }
 
         block = materializeBlock(block);
diff --git a/src/Interpreters/PreparedSets.cpp b/src/Interpreters/PreparedSets.cpp
index 538108165fb..c69e2f84d42 100644
--- a/src/Interpreters/PreparedSets.cpp
+++ b/src/Interpreters/PreparedSets.cpp
@@ -1,21 +1,22 @@
 #include <chrono>
 #include <variant>
-#include <Interpreters/PreparedSets.h>
-#include <Interpreters/Set.h>
-#include <Interpreters/InterpreterSelectWithUnionQuery.h>
-#include <IO/Operators.h>
-#include <Common/logger_useful.h>
+#include <Core/Block.h>
 #include <Core/Settings.h>
-#include <Processors/QueryPlan/CreatingSetsStep.h>
+#include <IO/Operators.h>
+#include <Interpreters/InterpreterSelectWithUnionQuery.h>
+#include <Interpreters/PreparedSets.h>
+#include <Interpreters/ProcessorsProfileLog.h>
+#include <Interpreters/Set.h>
 #include <Processors/Executors/CompletedPipelineExecutor.h>
 #include <Processors/QueryPlan/BuildQueryPipelineSettings.h>
+#include <Processors/QueryPlan/CreatingSetsStep.h>
 #include <Processors/QueryPlan/Optimizations/QueryPlanOptimizationSettings.h>
+#include <Processors/QueryPlan/QueryPlan.h>
 #include <Processors/Sinks/EmptySink.h>
 #include <Processors/Sinks/NullSink.h>
-#include <Processors/QueryPlan/QueryPlan.h>
-#include <Core/Block.h>
 #include <QueryPipeline/QueryPipelineBuilder.h>
 #include <QueryPipeline/SizeLimits.h>
+#include <Common/logger_useful.h>
 
 namespace DB
 {
@@ -239,6 +240,8 @@ SetPtr FutureSetFromSubquery::buildOrderedSetInplace(const ContextPtr & context)
     if (!set_and_key->set->isCreated())
         return nullptr;
 
+    logProcessorProfile(context, pipeline.getProcessors());
+
     return set_and_key->set;
 }
 
diff --git a/src/Interpreters/ProcessorsProfileLog.cpp b/src/Interpreters/ProcessorsProfileLog.cpp
index 8a646b5d0e7..d7811e5e9e2 100644
--- a/src/Interpreters/ProcessorsProfileLog.cpp
+++ b/src/Interpreters/ProcessorsProfileLog.cpp
@@ -1,5 +1,6 @@
 #include <Interpreters/ProcessorsProfileLog.h>
 
+#include <Core/Settings.h>
 #include <DataTypes/DataTypeArray.h>
 #include <DataTypes/DataTypeDate.h>
 #include <DataTypes/DataTypeDateTime.h>
@@ -8,16 +9,19 @@
 #include <DataTypes/DataTypeNullable.h>
 #include <DataTypes/DataTypeString.h>
 #include <DataTypes/DataTypesNumber.h>
+#include <Interpreters/Context.h>
 #include <base/getFQDNOrHostName.h>
 #include <Common/ClickHouseRevision.h>
 #include <Common/DateLUTImpl.h>
-#include <Common/logger_useful.h>
-
-#include <array>
 
 namespace DB
 {
 
+namespace Setting
+{
+extern const SettingsBool log_processors_profiles;
+}
+
 ColumnsDescription ProcessorProfileLogElement::getColumnsDescription()
 {
     return ColumnsDescription
@@ -81,5 +85,57 @@ void ProcessorProfileLogElement::appendToBlock(MutableColumns & columns) const
     columns[i++]->insert(output_bytes);
 }
 
+void logProcessorProfile(ContextPtr context, const Processors & processors)
+{
+    const Settings & settings = context->getSettingsRef();
+    if (settings[Setting::log_processors_profiles])
+    {
+        if (auto processors_profile_log = context->getProcessorsProfileLog())
+        {
+            ProcessorProfileLogElement processor_elem;
 
+            const auto time_now = std::chrono::system_clock::now();
+            processor_elem.event_time = timeInSeconds(time_now);
+            processor_elem.event_time_microseconds = timeInMicroseconds(time_now);
+            processor_elem.initial_query_id = context->getInitialQueryId();
+            processor_elem.query_id = context->getCurrentQueryId();
+
+            auto get_proc_id = [](const IProcessor & proc) -> UInt64 { return reinterpret_cast<std::uintptr_t>(&proc); };
+
+            for (const auto & processor : processors)
+            {
+                std::vector<UInt64> parents;
+                for (const auto & port : processor->getOutputs())
+                {
+                    if (!port.isConnected())
+                        continue;
+                    const IProcessor & next = port.getInputPort().getProcessor();
+                    parents.push_back(get_proc_id(next));
+                }
+
+                processor_elem.id = get_proc_id(*processor);
+                processor_elem.parent_ids = std::move(parents);
+
+                processor_elem.plan_step = reinterpret_cast<std::uintptr_t>(processor->getQueryPlanStep());
+                processor_elem.plan_step_name = processor->getPlanStepName();
+                processor_elem.plan_step_description = processor->getPlanStepDescription();
+                processor_elem.plan_group = processor->getQueryPlanStepGroup();
+
+                processor_elem.processor_name = processor->getName();
+
+                processor_elem.elapsed_us = static_cast<UInt64>(processor->getElapsedNs() / 1000U);
+                processor_elem.input_wait_elapsed_us = static_cast<UInt64>(processor->getInputWaitElapsedNs() / 1000U);
+                processor_elem.output_wait_elapsed_us = static_cast<UInt64>(processor->getOutputWaitElapsedNs() / 1000U);
+
+                auto stats = processor->getProcessorDataStats();
+                processor_elem.input_rows = stats.input_rows;
+                processor_elem.input_bytes = stats.input_bytes;
+                processor_elem.output_rows = stats.output_rows;
+                processor_elem.output_bytes = stats.output_bytes;
+
+                processors_profile_log->add(processor_elem);
+            }
+        }
+    }
+}
 }
diff --git a/src/Interpreters/ProcessorsProfileLog.h b/src/Interpreters/ProcessorsProfileLog.h
index fbf52f45f56..9cc2ab6c7f0 100644
--- a/src/Interpreters/ProcessorsProfileLog.h
+++ b/src/Interpreters/ProcessorsProfileLog.h
@@ -50,4 +50,5 @@ public:
     using SystemLog<ProcessorProfileLogElement>::SystemLog;
 };
 
+void logProcessorProfile(ContextPtr context, const Processors & processors);
 }
diff --git a/src/Interpreters/executeQuery.cpp b/src/Interpreters/executeQuery.cpp
index 9250c069283..fa28fa04ab1 100644
--- a/src/Interpreters/executeQuery.cpp
+++ b/src/Interpreters/executeQuery.cpp
@@ -117,7 +117,6 @@ namespace Setting
     extern const SettingsOverflowMode join_overflow_mode;
     extern const SettingsString log_comment;
     extern const SettingsBool log_formatted_queries;
-    extern const SettingsBool log_processors_profiles;
     extern const SettingsBool log_profile_events;
     extern const SettingsUInt64 log_queries_cut_to_length;
     extern const SettingsBool log_queries;
@@ -551,53 +550,8 @@ void logQueryFinish(
             if (auto query_log = context->getQueryLog())
                 query_log->add(elem);
         }
-        if (settings[Setting::log_processors_profiles])
-        {
-            if (auto processors_profile_log = context->getProcessorsProfileLog())
-            {
-                ProcessorProfileLogElement processor_elem;
-                processor_elem.event_time = elem.event_time;
-                processor_elem.event_time_microseconds = elem.event_time_microseconds;
-                processor_elem.initial_query_id = elem.client_info.initial_query_id;
-                processor_elem.query_id = elem.client_info.current_query_id;
 
-                auto get_proc_id = [](const IProcessor & proc) -> UInt64 { return reinterpret_cast<std::uintptr_t>(&proc); };
-
-                for (const auto & processor : query_pipeline.getProcessors())
-                {
-                    std::vector<UInt64> parents;
-                    for (const auto & port : processor->getOutputs())
-                    {
-                        if (!port.isConnected())
-                            continue;
-                        const IProcessor & next = port.getInputPort().getProcessor();
-                        parents.push_back(get_proc_id(next));
-                    }
-
-                    processor_elem.id = get_proc_id(*processor);
-                    processor_elem.parent_ids = std::move(parents);
-
-                    processor_elem.plan_step = reinterpret_cast<std::uintptr_t>(processor->getQueryPlanStep());
-                    processor_elem.plan_step_name = processor->getPlanStepName();
-                    processor_elem.plan_step_description = processor->getPlanStepDescription();
-                    processor_elem.plan_group = processor->getQueryPlanStepGroup();
-
-                    processor_elem.processor_name = processor->getName();
-
-                    processor_elem.elapsed_us = static_cast<UInt64>(processor->getElapsedNs() / 1000U);
-                    processor_elem.input_wait_elapsed_us = static_cast<UInt64>(processor->getInputWaitElapsedNs() / 1000U);
-                    processor_elem.output_wait_elapsed_us = static_cast<UInt64>(processor->getOutputWaitElapsedNs() / 1000U);
-
-                    auto stats = processor->getProcessorDataStats();
-                    processor_elem.input_rows = stats.input_rows;
-                    processor_elem.input_bytes = stats.input_bytes;
-                    processor_elem.output_rows = stats.output_rows;
-                    processor_elem.output_bytes = stats.output_bytes;
-
-                    processors_profile_log->add(processor_elem);
-                }
-            }
-        }
+        logProcessorProfile(context, query_pipeline.getProcessors());
 
         logQueryMetricLogFinish(context, internal, elem.client_info.current_query_id, time_now, std::make_shared<QueryStatusInfo>(info));
     }